Bruker Dimension Icon AFM with 8 inch wafer stage

Wafer Scale Atomic Force Microscopy (AFM)

The wafer scale AFM is ideal for characterisation of your materials or devices across full 8″ (200 mm) wafer.

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Detailed Description

The 8″ Mapping Atomic Force Microscope (Bruker Dimension Icon Large Sample Tip) is a scanning probe microscopy system capable of accurately mapping materials topography and device electrical properties at the nanoscale across a full 8″ (200 mm) wafer, without requiring any wafer rotation or manual position adjustment, thus allowing semi-automated morphology and performance sampling.

The AFM has the capability to measure a wide range of electrical properties on both unprocessed materials and processed operating devices. These include resistance, conductance, capacitance, local potential, piezoelectric response, magnetism and photoconductivity.

Key functions include measuring the electrical conductivity of delicate samples (using PeakForce tunnelling atomic force microscopy) and the photoconductive properties of photovoltaic materials (using photoconductive atomic force microscopy).

Uses/Applications

It has the capability to measure a wide range of electrical properties on both unprocessed materials and processed operating devices. These include resistance, conductance, capacitance, local potential, piezoelectric response, magnetism and photoconductivity.


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