Bespoke 'in house' Physical Vapour Deposition rig

Multi-source Sputter Physical Vapour Deposition

Multi-source Physical Vapour Deposition sputter coater.

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Detailed Description

4 x Planar magnetron sputter coater (target size 345x145mm), sputtering horizontally. The substrates are mounted on an 8-station carousel and can be mounted on a flat holder (approx. 150 x 150mm) or rotated in front of the flux. The system is fully automated allowing complex deposition recipes with pulsed-DC power supplies. Substrate bias and glow discharge cleaning are installed.


Deposition of multi-layered wear resistant coatings. Deposition of metallic layers by sputter deposition.