Measurement is non-contact and with high accuracy. The photomultiplier gives 16 times more sensitivity, ensuring 3D measurement data, over any shape or material, is obtained in a short time.
The system requires no specific sample preparation and there is no damage to the sample.
Field of view
Laser measurement speed
4-120 Hz and 7900Hz
pinhole confocal optical system
Light receiving element
Laser light source
violet laser (wavelength of 408 nm)
Height measurement display resolution
Height measurement accuracy
0.2+L/100 µm (L=Measuring Length)
Width measurement display resolution
Width measurement accuracy
Maximum sample height
XY stage operational range
70 x 70 mm
Maximum capture resolution
3072 x 2304 pixel
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