Technology Platforms
Royce Technology Platforms are groupings of cutting-edge facilities and expertise. Each Platform has a Technology Platform Lead responsible for developing and enhancing the facilities and supporting related research activities which utilise Royce Equipment
Physical Vapour Deposition & Characterisation
The PVDC enables the growth of thin films and devices with sub-nm thickness control of individual layers, underpinning the development of advanced functional materials and devices for energy-efficient electronics.
Thin Film Device Materials
This platform provides capability for the manufacture of bespoke thin film devices, from deposition and patterning to electrical, physical, and optical characterisation, embracing the entire research and development life cycle.
Multi Chamber Deposition
The Royce Deposition System at the University of Leeds is a multi-chamber, multi-technique facility for thin film growth. Comprised of four deposition chambers connected via ultra-high vacuum transfer chambers, the Royce Deposition System allows for different deposition techniques to be combined.
Doping Materials and Device Fabrication
This platform features a novel co-beam tool utilising the implantation capabilities of a liquid metal ion source (LMIG) and the positioning accuracy of an SEM, for localised area implantation or deterministic implantation.