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Thin Film Device Materials
Technology Platform
About the platform
The Royce Thin Film Device Materials Platform at Imperial College London provides a platform for the manufacture of bespoke thin film devices, from deposition and patterning to electrical, physical, and optical characterisation, embracing the entire research and development life cycle.
Our unique capabilities enable users to take a thin-film device – using metals, oxides or nitrides – from conception to characterisation within two weeks as all the necessary equipment is available in our laboratories.
Our vision is to work with academic and industrial partners to realise their proof-of-principle projects and process developments in our facility, and use our consolidated knowledge and expertise to enable the next generation of exciting scientific discoveries.
The facility was originally founded by Prof Neil Alford and Dr Peter Petrov in 2001 and is open to users from both academia and industry. It is located on the 8th floor of the new, state-of-the-art Sir Michael Uren Hub based at Imperial’s White City campus.
Platform Lead
Dr Peter K Petrov
Technology Platform Lead: Thin Film Device Materials
Dr Peter K Petrov is a Principal Scientist at the Dept. of Materials at Imperial College London and the Royce Technology Platform Lead for Thin Film Device Materials. He has more than 25 years of experience in the deposition and nanostructuring of thin film multilayer structures and devices. He authored more than 100 high-impact factor scientific papers with c. 2,500 citations (h=25), and five patent applications, which are now granted patents (two patents were transferred to Ericsson AB).
Dr Petrov leads an active research group of 3 PDRAs, 5 PhD students and 3 MSc students. His most recent research is on the development of plasmonic materials, nano enclosures for vaccine formulations, robust antimicrobial surfaces and devices for energy harvesting and biosensing.
Brochure
Equipment
Patterning
Raith E-Beam Lithographer
Patterning
Karl Suss Mask Aligner
OAI Mask Aligner
Spin Coater
Deposition, Patterning, Characterisation
Combined Magnetron Sputtering (HIPIMS) and E-Beam Deposition
Wide Beam Ion Milling
Inducitvely Coupled Palsma – Reactive Ion Etching
Surface Profiler
Thin Film Analyser
Deposition, Patterning, Characterisation
HEX-L Sputtering System
HEX Sputtering System
Combined Physical and Chemical Vapour Deposition
Reactive Ion Etching
Dicing Saw
Surface Profiler
Characterisation
Room Temperature Probe Station
Cryo Probe Station
RF LCR Meter
Semiconductor Device Analyser
Vector Network Analyser
Ferroelectric Test System
Current/Voltage Source and Measurement
Thermal Analyser
Preparation
1600°C Muffle Furnace
1200°C Tube Furnace
250°C Oven
Planetary Ball Mill
Target Press
Analytical Balance
Characterisation
MultiCore High-Performance X-ray Diffractometer
Scanning Electron Microscope
Dual beam FIB with Cyro-Stage
Characterisation, Deposition
Raman Spectrometer
Atomic Force Microscope
Pulsed Laser Deposition – 4 Chambers
