We warmly invite you to register for our upcoming Cluster Tool Symposium on 27th of October 2021, an in-person event at the Cavendish Laboratory in Cambridge. This one-day symposium will showcase recent results from the growth, characterisation, testing and packaging of novel devices, and will explore potential new ideas and research directions for the Cluster Tool.
The ambient processing cluster tool is a custom-built glovebox cluster tool that integrates different vacuum as well as liquid-based deposition technologies for a wide range of functional materials into a common inert glove box atmosphere. It comprises ten glove box modules that are interconnected by a semi-automated inert atmosphere transfer system and includes tools such as thermal evaporation, sputtering, pulsed laser deposition (PLD) and atomic layer deposition (ALD) as well as aerosol printing, screen printing and slot-die coating. The tool also includes modules for metrology, thin film encapsulation and packaging. The tool gives access to a wide range of functional materials, including transition metal oxides for battery and other applications, organic and hybrid organic-inorganic semiconductors, two-dimensional materials, polymer composites etc.
Much of the academic work on the tool is undertaken as part of the Royce Institute’s Atoms to Devices (A2D) theme. For more information see: https://www.royce.ac.uk/research-areas/atoms-to-devices/
For more information on accessing the facility see the local Royce@Cambridge website.