This website uses cookies so that we can provide you with the best user experience possible. Cookie information is stored in your browser and performs functions such as recognising you when you return to our website and helping our team to understand which sections of the website you find most interesting and useful.
ZEISS SIGMA Integrated Analytical SEM and 3View system
Variable Pressure Scanning Electron Microscope (VP-SEM)
Variable Pressure Scanning Electron Microscope (VP-SEM)
- Partner:The University of Manchester
- Facility:Multidisciplinary Characterisation Facility (MCF)
Or call us now on 0161 275 8382
Detailed Description
The Variable Pressure Scanning Electron Microscope (VP-SEM) allows for the surface characterisation of a wide range of materials, including those that are electrically non-conductive. The Oxford EBSD and EDS detectors allow for mapping of crystallographic orientation and chemical distribution respectively.
Uses/Applications
Multiple feed-throughs into the microscope chamber allow for a range of experiments to be carried out in-situ. Alternate stages include pico-indention and micro-tensile/compression for measuring mechanical responses to deformation at the fine scale, and a 5-axis tilt stage combined with a large area backscattered electron detector to allow controlled electron channelling contrast imaging (ECCI) for dislocation imaging.
Electron Source
Schottky Thermal Field Emitter
Resolution @ 15 kV
0.8 nm
Resolution @ 1 kV
1.6 nm
Max. Scan Speed
50 ns/pixel
Accelerating Voltage
0.02 → 30 kV
Magnification
10× → 1,000,000×
Probe Current
4 pA → 40 nA
Image Framestore
32k × 24k pixels
Variable Pressure
2 → 133 Pa
Stage Type
5 axis eucentric
Stage travel
X/Y= 130 mm,
Z = 50 mm,
R = 360° Continuous,
T = -3°→ 70°