Xenon Plasma Focused Ion Beam

Thermo Fisher Scientific Helios G4 CXe DualBeam Plasma Focused Ion Beam (Xenon PFIB)

Plasma-FIB with analytical capabilities (SIMS and EDX)

Description

The instrument delivers capabilities for large volume 3D characterization, Ga+ free sample preparation and precise micromachining. It combines the new PFIB 2.0 column and the Monochromated Elstar SEM column to deliver the most advanced focused ion- and electron beam performance.

Complementing the system’s high resolution imaging and large volume milling abilities are an Oxford Instruments Ultim Max 170 X-ray detector and Hiden Analytical EQS SIMS detector for analytics. The system is uniquely set up for the detection of light elements, with SIMS giving the system the capability to detect all elements including, helium and lithium.

A Gatan iLoad system is available for handling air sensitive samples, and the preparation of soft matter and biological samples is made possible by a cryo stage.

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