Scanning Electron Microscope / Focus Ion Beam

FEI Quanta 3D FIB

The Quanta™ 3D FEG is a DualBeam™ with high-resolution capability, low-vacuum SEM/FIB for 2D and 3D material characterisation and analysis.

Description

The Quanta™ 3D FEG is a DualBeam™ with high-resolution capability, low-vacuum SEM/FIB for 2D and 3D material characterization and analysis. It has three imaging modes – high-vacuum, low-vacuum and ESEM™.

Uses / Applications

This system is equipped with Gatan XuM, which is used for in-situ X-ray tomography. The details of XuM are:

  • Phase and Absorption contrast imaging
  • 1340 x 1300 pixel X-ray camera with 20 um pixel size
  • Resolution: ~200-400 nm
  • Maximum typical sample diameter for a metallic sample: ~1 mm
  • Field of view: 20 um at highest magnification to 10 mm at lowest magnification
  • Targets: Ag, V, Fe, Cu, W, Pt and Au
  • Maximum primary X-ray energy: 9.7 kV monochromatic
  • Can be used for in-situ experiments with a range of rigs

Specification

The details of XuM are: Phase and Absorption contrast imaging1340 x 1300 pixel X-ray camera with 20 um pixel size. Resolution: ~200-400 nm. Maximum typical sample diameter for a metallic sample: ~1 mm. Field of view: 20 um at highest magnification to 10 mm at lowest magnification. Targets: Ag, V, Fe, Cu, W, Pt and Au. Maximum primary X-ray energy: 9.7 kV monochromatic. Can be used for in-situ experiments with a range of rigs.

Specification

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