Scanning Electron Microscope (FIB-SEM)

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Home / Equipment & Facilities / Scanning Electron Microscope (FIB-SEM)

Description

Optimised for nanofabrication, three-dimensional data-sets containing imaging, chemical and crystallographic information can be created from serial cross sectional imaging on this instrument, using the advanced Zeiss Atlas 5 imaging and patterning engine. An Oxford Instruments XMax^N 150 EDX detector and Nordlys Max EBSD system is fitted for analytical work.

Scanning Electron Microscope (FIB-SEM)

Zeiss Crossbeam 540 FIB/SEM

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