Scanning Electron Microscope (SEM)

Tescan Mira 3 XH Field Emission Gun SEM

The Scanning Electron Microscope (SEM) uses a beam of electrons to image samples at high resolution.

Description

It is also used as an analysis tool to investigate the elemental composition and crystallographic structure of materials. It does this using a range of detectors that can collect electrons and x-rays emitted by excited atoms from the sample surface.

Uses / Applications

The versatility of the SEM (a large range in magnification, focal length and working distance) makes it an ideal instrument to study various characteristics of a material at the most appropriate length scale. The SEM is used to characterise fracture surfaces, grain size and morphology, and compositional differences, etc.

Tescan Mira XH Field Emission Gun SEM

Accelerating voltage: 200 V – 30 kV

High brightness Schottky emitter, up to 1.2 nm resolution at 30 kV

Magnification: 1x – 1,000,000x

Working distance: 2mm – 80mm

Probe current: 2 pA – 200 nA

Retracktable Backscattered Electron Detector

In-lens Secondary Electron detector for high resolution imaging

Oxford Instruments X-Max 80 for EDS characterisation

80 mm2 Silicon Drift Detector

Count rate > 500,000 cps

FWHM 129eV for MnKa

45° operating angle

AZtecEnergy software

Oxford Instruments Symmetry S2 EBSD

1244 x 1024 CCD

>4500 patterns per second

Sensitivity >800pps/nA

angular precision below 0.05 degrees

Aztec software

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