Nanoindenter - Henry Royce Institute

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Home / Equipment & Facilities / Nanoindenter

Description

The MTS XP Nanoindenter is an accurate, flexible, user-friendly instrument for nanomechanical testing. Electromagnetic actuation allows unparalleled dynamic range in force and displacement and measurement of deformation over six orders of magnitude (from nanometers to millimeters).Applications include semiconductor, thin films, and MEMs (wafer applications); hard coatings and DLC films; composite materials, fibres, and polymers; metals and ceramics

Specification

Results compliant with ISO 14577
Electromagnetic actuation for unparalleled dynamic range
Flexibility, upgradability for repeatable or new applications
Dynamic properties characterization via CSM by indent depth
Real-time control, easy protocol development, drift compensation

Specification