Description
Measurement is non-contact and with high accuracy. The photomultiplier gives 16 times more sensitivity, ensuring 3D measurement data, over any shape or material, is obtained in a short time.
The system requires no specific sample preparation and there is no damage to the sample.
Uses / Applications
A fast, non-contact imaging system that extracts surface height information, for small and large samples using a highly-effective stitching technique which is automated over large areas. As such the instrument is used across a wide range of materials systems.
Total magnification
x 28800
Field of view
11-5400 um
Laser measurement speed
4-120 Hz and 7900Hz
Optical system
pinhole confocal optical system
Light receiving element
16-bit photomultiplier
Laser light source
violet laser (wavelength of 408 nm)
Height measurement display resolution
0.5 nm
Height measurement accuracy
0.2+L/100 µm (L=Measuring Length)
Width measurement display resolution
1 nm
Width measurement accuracy
2%
Maximum sample height
28 mm
XY stage operational range
70 x 70 mm
Maximum capture resolution
3072 x 2304 pixel
