Laser pFIB

Thermo Scientific Helios 5 PFIB Laser System

Electron Microscopy Centre (EMC) | Photon Science Institute (PSI) | University of Manchester

This “TriBeam” configuration combines plasma focused ion beam milling with femtosecond laser ablation and SEM (scanning electron microscopy) imaging.

Description

Thermo Scientific Helios 5 PFIB has a femtosecond laser which can cut many materials at rates that are orders of magnitude faster than a typical FIB. A large cross-section (hundreds of micrometers) can be created in less than five minutes. Because the laser has a different removal mechanism (ablation versus the ion sputtering of FIB), it can easily process challenging materials, such as non-conductive or ion-beam-sensitive samples.

The extremely short duration of the femtosecond laser pulses introduces almost no artifacts such as heat impact, microcracking, melting, or those typical of traditional mechanical polishing. In most cases, the laser-milled surfaces are clean enough for direct SEM imaging and even for surface-sensitive techniques such as electron backscatter diffraction (EBSD) mapping.

This is suitable for applications such as transmission electron microscopy (TEM) sample preparation, atom probe tomography (APT) sample preparation, and 3D structural analysis.

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