Large Chamber Low Vacuum Scanning Electron Microscope

JEOL 6480-LV SEM with Oxford Instruments X-MAX 80 mm2 EDX Detector

Oxford Materials Characterisation Service (OMCS) | University of Oxford

Large Chamber Low Vacuum Scanning Electron Microscopes (LV-SEM) are advanced imaging systems designed to analyze large, bulky, or non-conductive samples without extensive preparation.

Description

The 6480 SEM is an advanced SEM with many different features, including:

– Oxford Instruments INCA Energy – EDX

– INCA Wave – WDX

– Channel 5 – EBSD

– Large Stage

– Low Vacuum capability

– Automated feature/particle analysis

Specification

Oxford Instruments INCA Microanalysis Software Suite