Equipment for high voltage measurements

  • Partner / Location:University of Cambridge
  • Contact:Professor Florin Udrea
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Detailed Description

This suite consists of state of the art equipment for high voltage measurements.

The suite includes a Cascade Tesla, 200 mm, high voltage, semiautomatic probe station; a Keysight B1505A Semiconductor Parametric Analyser/Curve Tracer; a number of stand-alone, high precision Source Measure Units (SMUs); and a high voltage capable, Keysight 2 GHz Oscilloscope.

This set of equipment allows testing and characterisation of devices and materials in wafer, die or packaged forms, very accurately from -55° C to +300° C. Ratings of the equipment are up to 100 A and 3kV for wafer level measurements using the probe station and 0.01 fA to 500 A and 10 kV for packaged samples. B1505A also has C-V capability from 1 kHz to 25 MHz with a combined voltage rating of 3 kV. The oscilloscope with the high voltage probe can capture switching transients up to 4 kV.

Uses/Applications

Testing and characterisation of devices and materials in wafer, die or packaged forms, very accurately from -55° C to +300° C

Cascade Tesla

200 mm, high voltage, semiautomatic probe station, ratings are up to 100 A and 3kV for wafer level measurements and 0.01 fA to 500 A and 10 kV for packaged samples

Keysight B1505A

Semiconductor Parametric Analyser/Curve Tracer with C-V capability from 1 kHz to 25 MHz with a combined voltage rating of 3 kV

SMUs

A number of stand-alone, high precision Source Measure Units (SMUs)

Keysight 2 GHz Oscilloscope

A high voltage capable oscilloscope which can capture switching transients up to 4 kV


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