This suite consists of state of the art equipment for high voltage measurements.
This suite includes a Cascade Tesla, 200 mm, high voltage, high current semiautomatic probe station, a Keysight B1505A Semiconductor Parametric Analyser/Curve Tracer, number of stand-alone, high precision Source Measure Units (SMUs) and a high voltage capable, Keysight 2 GHz Oscilloscope.
This set of equipment allows testing and characterisation of devices and materials in wafer, die or packaged forms, very accurately from -55 °C to +300 °C. Ratings of the equipment are up to 200 A and 3 kV for wafer level measurements using the probe station and 0.01 fA to 1500 A and 10 kV for packaged samples. B1505A also has C-V capability from 1 kHz to 5 MHz with a combined DC voltage rating of 3 kV. The oscilloscope with the high voltage probe can capture switching transients up to 4 kV.
Testing and characterisation of devices and materials in wafer, die or packaged forms, very accurately from -55° C to +300° C
200 mm high voltage semiautomatic probe station
Semiconductor Parametric Analyser/Curve Tracer
A number of stand-alone, high precision Source Measure Units (SMUs)
Keysight 2 GHz Oscilloscope
High voltage capable Keysight 2 GHz Oscilloscope
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