The Henry Royce Institute
The Henry Royce Institute

High Voltage Characterisation Suite

Cascade Tesla, Keysight B1505A, Source Measure Units, Keysight 2 GHz Oscilloscope

Equipment for high voltage measurements and for testing and characterisation of devices and materials in wafer, die or packaged forms.

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Description

This suite consists of state of the art equipment for high voltage measurements and allows for very accurate testing and characterisation of devices and materials in wafer, die or packaged forms, from -55° C to +300° C. Ratings of the equipment are up to 100 A and 3kV for wafer level measurements using the probe station and 0.01 fA to 500 A and 10 kV for packaged samples. The B1505A Semiconductor Parametric Analyser/Curve Tracer also has C-V capability from 1 kHz to 25 MHz with a combined voltage rating of 3 kV. The oscilloscope with the high voltage probe can capture switching transients up to 4 kV.

Uses / Applications

Industry users have used this equipment to characterise their devices in detail both at wafer level and in packaged form enabling them to enhance the performance of their products.

Specification

Cascade Tesla 200 mm high voltage semiautomatic probe station

Keysight B1505A Semiconductor Parametric Analyser/Curve Tracer

A number of stand-alone, high precision Source Measure Units (SMUs)

High voltage capable Keysight 2 GHz Oscilloscope

Tektronix IsoVu Isolated Voltage Probe

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