Korvus HEX Deposition System

HEX Deposition System

Economical solution for Physical Vapour Deposition (PVD)

  • Partner / Location:Imperial College London
  • Contact:Dr Peter Petrov
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Detailed Description

The Korvus Technology HEX deposition system provides an economical solution for Physical Vapour Deposition (PVD), suitable for teaching and research. Its modular construction allows various key elements to be exposed, discussed and interacted with, enabling student laboratories to fully explore the mechanical, material and growth elements of thin film research and nano-materials.

The system benefits from a rotatable 4” sample holder, and has two 2” DC sputtering sources, which allows bi-layer thin film deposition.

Uses/Applications

Some of the typical applications for the HEX thin film deposition system are lift off, EM sample preparation, contact metallisation, research and development of new coatings and sputter deposition, however the modular design of the system allow it to be reconfigured in minutes and ensure that it can be used for many more applications.


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