Field Emission Scanning Electron Microscope

ZEISS MERLIN FEG-SEM with eBruker EBSD

High-resolution Electron Backscatter Diffraction Analysis (EBSD) studies on a wide range of materials.

Description

The Zeiss MERLIN is fitted with a Bruker e-Flash EBSD camera, angle selective backscatter detector and forward scattered electron detectors. It is optimised for high-resolution EBSD studies on a wide range of materials.

Uses / Applications

  • The study of light, air sensitive materials
  • Characterisation of a range of challenging materials e.g. Li energy storage materials, superconductors

Specification

  • Operating voltages 20 V – 30 kV, up to 40 nA beam current
  • Resolution 0.8 nm @ 15 kV, 1.6 nm @ 1 kV
  • Inlens secondary electron and energy selective backscatter detectors
  • Angular selective backscatter detector for crystallographic contrast
  • Bruker Quantax EBSD system and eFlash camera and forward scattered electron detectors
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