Description
The Zeiss MERLIN is fitted with a Bruker e-Flash EBSD camera, angle selective backscatter detector and forward scattered electron detectors. It is optimised for high-resolution EBSD studies on a wide range of materials.
Uses / Applications
- The study of light, air sensitive materials
- Characterisation of a range of challenging materials e.g. Li energy storage materials, superconductors

Specification
- Operating voltages 20 V – 30 kV, up to 40 nA beam current
- Resolution 0.8 nm @ 15 kV, 1.6 nm @ 1 kV
- Inlens secondary electron and energy selective backscatter detectors
- Angular selective backscatter detector for crystallographic contrast
- Bruker Quantax EBSD system and eFlash camera and forward scattered electron detectors