Description
The system has the CMX module allowing for depth vs hardness/modulus/stiffness measurements. The high speed of measurement allows for grids of indents to be made across 100 µm range within hours for mapping of material properties.
Additionally, tip scanning imaging is possible because of the piezoelectric indenter control for pseudo AFM maps pre- and post-tests. This allows ex-situ testing of cantilevers with ease and sensitivity to measure slip or cracking events.

Specification
Normal Load Range: 75 nN to 10 mN
Normal Displacement Range: 0.2 nm to 5 µm
Nanowear – Normal Load Range: 100 nN to 1 mN
Wear Box Size: 4 µm – 60 µm
In-Situ SPM Imaging – Imaging Force: < 100nN
Maximum Scan Volume: 60 µm x 60 µm x 4 µm
Motorized Staging – Travel: 50 mm x 150 mm
Resolution: 50 nm