Plasma Focused Ion Beam with Time of Flight Secondary Ion Mass Spectrometer - Henry Royce Institute

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Home / Equipment & Facilities / Plasma Focused Ion Beam with Time of Flight Secondary Ion Mass Spectrometer

Description

Installed in an active lab in NNL’s Central Laboratory, the P-FIB is used for examination and fabrication of samples from active materials including irradiated fuels and structural materials.

Uses / Applications

This instrument combines the imaging and analysis capabilities of an SEM; sample preparation techniques of a plasma-FIB; and a comprehensive range of chemical, crystallographic, and isotopic characterisation techniques.

Specification

0.7 nm resolution @ 15 kV, SEM
Beam deceleration
Immersion optics
In beam: SE, BSE, low energy BSE
rBSE & rSTEM
Low vacuum mode
1 pA to 1 µA Xe ion beam current, <15 nm resolution
Rocking stage
OmniProbe OP400
5-line GIS system Pt, W, C, XeF2, O2
Analytics
Bruker 100 mm2 EDS
Bruker FlatQUAD 60 mm2 low kV EDS
Bruker EBSD with TKD
H-TOF SIMS, <60 nm lateral resolution, 3 nm depth, <1.5 ppm detection limit