Description
The Variable Pressure Scanning Electron Microscope (VP-SEM) allows for the surface characterisation of a wide range of materials, including those that are electrically non-conductive. The Oxford EBSD and EDS detectors allow for mapping of crystallographic orientation and chemical distribution respectively.
Uses / Applications
Multiple feed-throughs into the microscope chamber allow for a range of experiments to be carried out in-situ. Alternate stages include pico-indention and micro-tensile/compression for measuring mechanical responses to deformation at the fine scale, and a 5-axis tilt stage combined with a large area backscattered electron detector to allow controlled electron channelling contrast imaging (ECCI) for dislocation imaging.
Electron Source
Schottky Thermal Field Emitter
Resolution @ 15 kV
0.8 nm
Resolution @ 1 kV
1.6 nm
Max. Scan Speed
50 ns/pixel
Accelerating Voltage
0.02 → 30 kV
Magnification
10× → 1,000,000×
Probe Current
4 pA → 40 nA
Image Framestore
32k × 24k pixels
Variable Pressure
2 → 133 Pa
Stage Type
5 axis eucentric
Stage travel
X/Y= 130 mm,
Z = 50 mm,
R = 360° Continuous,
T = -3°→ 70°
