Description
The Quanta™ 3D FEG is a DualBeam™ with high-resolution capability, low-vacuum SEM/FIB for 2D and 3D material characterization and analysis. It has three imaging modes – high-vacuum, low-vacuum and ESEM™.
Uses / Applications
This system is equipped with Gatan XuM, which is used for in-situ X-ray tomography. The details of XuM are:
- Phase and Absorption contrast imaging
- 1340 x 1300 pixel X-ray camera with 20 um pixel size
- Resolution: ~200-400 nm
- Maximum typical sample diameter for a metallic sample: ~1 mm
- Field of view: 20 um at highest magnification to 10 mm at lowest magnification
- Targets: Ag, V, Fe, Cu, W, Pt and Au
- Maximum primary X-ray energy: 9.7 kV monochromatic
- Can be used for in-situ experiments with a range of rigs
Specification
The details of XuM are: Phase and Absorption contrast imaging1340 x 1300 pixel X-ray camera with 20 um pixel size. Resolution: ~200-400 nm. Maximum typical sample diameter for a metallic sample: ~1 mm. Field of view: 20 um at highest magnification to 10 mm at lowest magnification. Targets: Ag, V, Fe, Cu, W, Pt and Au. Maximum primary X-ray energy: 9.7 kV monochromatic. Can be used for in-situ experiments with a range of rigs.
Specification
