X-ray Photoelectron Spectrometer System

Thermo K-Alpha X-ray

Oxford Materials Characterisation Service (OMCS) | University of Oxford

A surface analysis technique used to determine elemental composition and chemical states, widely used in material science for studying thin films, nanoparticles, and surfaces.

Description

Analyzer type 

  • 180° double-focusing hemispherical analyzer, 128-channel detector

X-ray source type

  • Monochromated, micro-focused, low-power Al K-Alpha X-ray source

X-ray spot size

  • 50–400 µm (adjustable in 5 µm steps)

Depth profiling

  • EX06 ion source

Maximum Sample area

  • 60×60 mm

Maximum sample thickness

  • 20 mm

Vacuum system

  • Two turbo molecular pumps, with automated titanium sublimation pump and backing pump