Oerlikon Leybold Vacuum, Univex 300

Thermal Metal Evaporator

The equipment is not available until May 2021 due to being relocated.

The Thermal evaporator uses thermal heating to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms evaporated from the target to coat substrate in the vacuum chamber.

  • Partner / Location:University of Leeds
  • Contact:Chris Wood
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Detailed Description

The Leybold UNIVEX 300 thermal evaporator has a base pressure of 3×10-6mBar with rotatory rough pump and turbo pump. The evaporator is used mainly for ohmic contact with Au/Ge/Ni alloy. It has 5 boats that can potentially have more materials for evaporation.

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