Edwards Auto 306

Thermal Evaporator

The equipment is not available until May 2021 due to being relocated.

Thermal evaporation of thin metal films

  • Partner / Location:University of Leeds
  • Contact:Chris Wood
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Detailed Description

The thermal evaporator use thermal heat to heat up a solid target source in a boat such as tungsten boat to its melting temperature, causing atoms to evaporate from the target to coat substrate in the vacuum chamber. Edwards Auto 306 evaporator has a base pressure of 2×10-6mBar pumped with dry rough pump and turbo pump. It has four boats for Ti, Au, Cr, Al evaporation.


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