Scanning Electron Microscope with Cryo-Stage and Focused Ion Beam (Cryo-SEM)

The Tescan S8000G FIB/SEM has a thermal Field Emission Gun (FEG) capable of producing 400 nA of beam current. Images are obtained using in-chamber and in-column secondary electron (SE) and back-scattered electron (BSE) detectors. The instrument has a gallium ion column capable of producing 100 nA beam current. The analysis suite is provided by Oxford Instruments, and is comprised of EDS and WDS systems.