JEOL JXA-8530F Electron Microprobe

Electron Microprobe

Non-destructive technique for quantitative determination of chemical composition

  • Partner / Location:University of Manchester
  • Contact:Dr Helen Ryder
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Detailed Description

JEOL JXA-8530F Electron Microprobe is used for Electron Probe Microanalysis (EPMA), a non-destructive technique used to determine quantitatively the chemical composition of a sample. By firing a beam of electrons at a material, X-rays are generated that can be compared against X-rays generated from a known standard material and the composition of the elements calculated.

Uses/Applications

By moving this electron beam around a surface, changes in the intensity of characteristic X-rays generated can be used to generate an elemental map of the sample.

EPMA utilises Wavelength Dispersive Spectrometers (WDS) to distinguish between X-rays of very similar energy, giving a resolution order of magnitude higher than that of the comparable Energy Dispersive Spectroscopy (EDS).

The JEOL EPMA at the University of Manchester is equipped with the UK’s first Soft X-ray Emission Spectrometer (SXES), allowing us to probe oxidation state variations of elements down to and including Li.

JEOL JXA-8530F EPMA

Field Emission Gun electron source for high spatial resolution analysis, operating from 1kV to 30kV

Traditional secondary and backscattered electron imaging

4 Wavelength dispersive spectrometers (WDS) including LDE crystals for light elements and large area LIF and PET crystals, covering elements from Be to U down to concentrations of 10s of ppm.

SDD EDS detector that can be used alongside WDS

Soft X-ray Emission Spectrometer (SXES) capable of detecting Li and distinguishing changing in coordination environment

JEOL panchromatic cathodoluminescence detector for imaging samples that illuminate under the electron beam

Field cancellation system


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