The Helios NanoLab 600 Focused Ion Beam (FIB) system uses a Ga+ ion beam to raster over the surface of a sample in a similar way as the electron beam in a scanning electron microscope (SEM). The ion beam allows the milling of small holes in the sample at well localised sites, so that cross-sectional images of the structure can be obtained or that modifications in the structures can be made. It allows non-destructive imaging at higher magnifications and with better image resolution, and also more accurate control of the progress of the milling.
This Focussed Ion Beam Scanning Electron Microscope (FIB-SEM) instrument combines the imaging capabilities of an SEM with the milling capabilities of an ion beam to simultaneously image and mill a sample. The FIB-SEM is routinely used for general sample milling and for TEM sample preparation. Using this capability a sample can be located, milled and removed from a specific area of interest using the Ga+ ion beam, and transferred to a suitable TEM grid. The sample is then further milled using the ion beam until electron transparency is achieved. The milling progress is monitored using the electron beam which gives minimum damage and higher resolution images of the region of interest.
The instrument is equipped with a carbon and platinum gas injection system, Omniprobe micromanipulator and an in-situ STEM detector.
- General sample milling
- TEM sample preparation
- Milling of small holes in the sample at well localised sites
- Non-destructive imaging at higher magnifications and with better image resolution
- More accurate control of the progress of milling
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