Scios 2 HiVac with Retractable RGB CL Detector

Dual Beam FIB

Dual Beam Focused Ion Beam with Cryo stage

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Detailed Description

This is a dual beam FIB to allow sample preparation and analysis of thin films. This includes TEM prep, slice and view tomography and cross-sectional imaging. The instrument is equipped with a cold stage so analysis of beam sensitive samples is also possible. The system is equipped with a range of detects including backscatter, secondary electron, STEM and Cathodoluminescence.


Due to the addition of a cold stage, a wide range of samples including beam sensitive samples can be analysed.