Braun bespoke ten-glovebox tool

Ambient Processing Cluster Tool

Custom-built glovebox cluster tool, integrating various deposition technologies.

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Detailed Description

• Battery module (DC/RF sputterer with heater, PLD system)
• ALD module
• Aerosol jet printer
• Slot-die coater
• Organic evaporator
• Hybrid evaporator
• Dektak profilometer
• Packaging module (dispenser and UV press)
• Substrate asher and oven
• Spin coater and hotplates

Uses/Applications

A custom- built glovebox cluster tool that integrates different vacuum and liquid-based deposition technologies for a wide range of functional materials into a common inert glove box atmosphere. It comprises ten glove box modules that are interconnected by a semi-automated inert atmosphere transfer system. This facilitates combining different materials from both wet and vacuum processes into functional hybrid architectures.

Braun bespoke ten-glovebox tool:
• Battery module (DC/RF sputterer with heater, PLD system)
• ALD module
• Aerosol jet printer
• Slot-die coater
• Organic evaporator
• Hybrid evaporator
• Dektak profilometer
• Packaging module (dispenser and UV press)
• Substrate asher and oven
• Spin coater and hotplates

Enquire now

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