ZEISS SIGMA Integrated Analytical SEM and 3View system

Variable Pressure Scanning Electron Microscope (VP-SEM)

Home / Equipment and Facilities / Variable Pressure Scanning Electron Microscope (VP-SEM)

Variable Pressure Scanning Electron Microscope (VP-SEM) to allow for the surface characterisation of a wide range of materials, including those that are electrically non-conductive. The Oxford EBSD and EDS detectors allow for mapping of crystallographic orientation and chemical distribution respectively.

Electron Source

Schottky Thermal Field Emitter

Resolution @ 15 kV

0.8 nm


Resolution @ 1 kV

1.6 nm


Max. Scan Speed

50 ns/pixel


Accelerating Voltage

0.02 → 30 kV



10× → 1,000,000×


Probe Current

4 pA → 40 nA


Image Framestore

32k × 24k pixels


Variable Pressure

2 → 133 Pa


Stage Type

5 axis eucentric


Stage travel

X/Y= 130 mm,

Z = 50 mm,

R = 360° Continuous,

T = -3°→ 70°


Multiple feed-throughs into the microscope chamber allow for a range of experiments to be carried out in-situ. Alternate stages include pico-indention and micro-tensile/compression for measuring mechanical responses to deformation at the fine scale, and a 5-axis tilt stage combined with a large area backscattered electron detector to allow controlled electron channelling contrast imaging (ECCI) for dislocation imaging.

Book this equipment

Fill out the form to enquire about this piece of equipment and a member of our team will be in touch with you