Wafer Scale Atomic Force Microscopy (AFM)
Materials for Energy Efficient ICT
The 8″ Mapping Atomic Force Microscope is a scanning probe microscopy system capable of accurately mapping materials topography and device electrical properties at the nanoscale across a full 8″ (200 mm) wafer without requiring any wafer rotation or manual position adjustment, thus allowing semi-automated morphology and performance sampling.
It has the capability to measure a wide range of electrical properties on both unprocessed materials and processed operating devices. These include resistance, conductance, capacitance, local potential, piezoelectric response, magnetism and photoconductivity.
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