Quanta 250 SEM with 3D EDS 3View system

Scanning Electron Microscope

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The GATAN 3View is effectively an ultramicrotome mounted inside the SEM chamber. It is possible to obtain large, high-resolution volumes using either the high or low vacuum mode of the microscope.

The high stability and precisely controlled stage is capable of cutting slice thicknesses down to 5 nm, which, combined with low voltage imaging, improves Z resolution. Both SE and BSE images can be captured and reconstructed. A series of stacked BSE images can qualitatively highlight the atomic number difference in the analysed volume. An integrated EDS system is capable of semi-quantitative elemental analysis of the same volume.

Accelerating voltage

200 V to 30 kV

Probe current

up to 2 μA

High vacuum mode (6e-4 Pa)

1.0 nm at 30 kV (SE)

3.0 nm at 1 kV (SE)

Low vacuum mode (10 to 130 Pa)

1.4 nm at 30 kV (BSE)

3.0 nm at 3 kV (SE)

Knife travel distance

1.2 mm

Z travel distance

600 um

Stage travel distance X-Y

±700 um

Cut thickness

5- 200 nm

Cutting speed

0.1-1.2 mm/sec

Image resolution

8k x 8k

EDX detector

X-Max 80 (Silicon Drift Detector)


This system is best suited to soft materials such as biological samples, polymers, aluminium and magnesium.

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