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Tescan XEIA3 PFIB-SEM
Plasma Focused Ion Beam with Time of Flight Secondary Ion Mass Spectrometer
Plasma FIB featuring a high-resolution (> 3500 m/z) SIMS, as well as a full complement of analytical hardware (EDS, EBSD) – including an EDS system with 1.1 Sr solid angle (Bruker FlatQUAD).
- Partner:National Nuclear Laboratory
- Facility:Central Laboratory
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Detailed Description
Installed in an active lab in NNL’s Central Laboratory, the P-FIB is used for examination and fabrication of samples from active materials including irradiated fuels and structural materials.
Uses/Applications
This instrument combines the imaging and analysis capabilities of an SEM; sample preparation techniques of a plasma-FIB; and a comprehensive range of chemical, crystallographic, and isotopic characterisation techniques.
- 0.7 nm resolution @ 15 kV, SEM
- Beam deceleration
- Immersion optics
- In beam: SE, BSE, low energy BSE
- rBSE & rSTEM
- Low vacuum mode
- 1 pA to 1 µA Xe ion beam current, <15 nm resolution
- Rocking stage
- OmniProbe OP400
- 5-line GIS system Pt, W, C, XeF2, O2
- Analytics
- Bruker 100 mm2 EDS
- Bruker FlatQUAD 60 mm2 low kV EDS
- Bruker EBSD with TKD
- H-TOF SIMS, <60 nm lateral resolution, 3 nm depth, <1.5 ppm detection limit